Luận án Tiến sĩ Điện tử Viễn thông: Design, simulation, fabrication and performance analysis of a piezoresistive micro accelerometer

One of the important contributions of this thesis is that a hierarchical MEMS design synthesis and optimization process have been developed for and validated by the design of a specific structure of MEMS based accelerometer.
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Luận án Tiến sĩ Điện tử Viễn thông: Design, simulation, fabrication and performance analysis of a piezoresistive micro accelerometer CONTENTSDeclarationAbbreviation & NotationsList of TablesList of Figures and GraphsCHAPTER 1.............................................................................................................. 2INTRODUCTION .................................................................................................... 21.1 Motivation and Objectives of This Thesis ........................................................ 21.2 Overview of MEMS ............................................................................................ 31.3 Reviews on Silicon Micro Accelerometers ....................................................... 41.4 Reviews on Development of Multi-Axis Accelerometers ................................ 71.5 Reviews on Performance Optimization of Multi-Axis Accelerometers ...... 101.6 Content of the Thesis ........................................................................................ 12CHAPTER 2............................................................................................................ 14TRENDS IN DESIGN CONCEPTS FOR MEMS: APPLIED FORPIEZORESISTIVE ACCELEROMETER .......................................................... 142.1 Open-loop Accelerometers............................................................................... 142.2 Piezoresistive Accelerometer ........................................................................... 212.3 Overview of MNA and FEM Softwares ......................................................... 352.4 Summary ........................................................................................................... 41CHAPTER 3............................................................................................................ 42DESIGN PRINCIPLES AND ILLUSTRATING APPLICATION: A 3-DOFACCELEROMETER ............................................................................................. 423.1 Introductions ..................................................................................................... 423.2 Working Principle for a 3-DOF Accelerometers ........................................... 423.3 A Systematic and Efficient Approach of Designing Accelerometers........... 443.4 Structure Analysis and the Design of the Piezoresistive Sensor .................. 523.5 Measurement Circuits ...................................................................................... 573.6 Multiphysic Analysis of the 3-DOF Accelerometer ....................................... 61Design, Simulation, Fabrication and Performance Analysis of a PiezoresistiveMicro Accelerometer3.7 Noise Analysis ................................................................................................... 683.8 Mask Design ...................................................................................................... 723.9 Summary ........................................................................................................... 77CHAPTER 4............................................................................................................ 79FABRICATION AND CALIBRATION OF THE 3-DOF ACCELEROMETER.................................................................................................................................. 794.1 Fabrication Process of the Acceleration Sensor ............................................ 794.2 Measurement Results ....................................................................................... 894.3 Summary ......................................................................................................... 100CHAPTER 5.......................................................................................................... 101OPTIMIZATION BASED ON FABRICATED SENSOR ............................... 1015.1 Introductions ................................................................................................... 1015.2 Pareto Optimality Processes .......................................................................... 1015.3 Summary ......................................................................................................... 110CONCLUSIONS ................................................................................................... 111Design, Simulation, Fabrication and Performance Analysis of a PiezoresistiveMicro Accelerometer CHAPTER 1 INTRODUCTION1.1 Motivation and Objectives of This ThesisDuring the last decades, MEMS technology has undergone rapid development,leading to the successful fabrication of miniaturized mechanical structuresintegrated with microelectronic components. Accelerometers are in great demandfor specific applications ranging from guidance and stabilization of spacecrafts toresearch on vibrations of Parkinson patients’ fingers. Generally, it is desirable thataccelerometers exhibit a linear response and a high signal-to-noise ratio. Among themany technological alternatives available, piezoresistive accelerometers arenoteworthy. They suffer from dependence on temperature, but have a DC response,simple readout circuits, and are capable of high sensitivity and reliability. Inaddition, this low-cost technology is suitable for multi degrees-of-freedomaccelerometers which are high in demand in many applications.In order to commercialize MEMS products effectively, one of the key factors is thestreamlining of the design process. The design flow must correctly address designperformance specifications prior to fabrication. However, CAD tools are still scarceand poorly integrated when it comes to MEMS design. One ...